{"id":6164,"date":"2025-04-26T20:30:52","date_gmt":"2025-04-26T12:30:52","guid":{"rendered":"https:\/\/news.rg-laser.com\/?p=6164"},"modified":"2025-04-26T20:30:53","modified_gmt":"2025-04-26T12:30:53","slug":"%e6%88%91%e5%9b%bd13-5nm%e6%9e%81%e7%b4%ab%e5%a4%96%e5%85%89%e5%88%bb%e5%85%89%e6%ba%90%e7%a0%94%e5%8f%91%e6%96%b0%e8%bf%9b%e5%b1%95-%e7%a0%b4%e5%b1%80%e9%ab%98%e8%bd%ac","status":"publish","type":"post","link":"https:\/\/news.rg-laser.com\/index.php\/2025\/04\/26\/%e6%88%91%e5%9b%bd13-5nm%e6%9e%81%e7%b4%ab%e5%a4%96%e5%85%89%e5%88%bb%e5%85%89%e6%ba%90%e7%a0%94%e5%8f%91%e6%96%b0%e8%bf%9b%e5%b1%95-%e7%a0%b4%e5%b1%80%e9%ab%98%e8%bd%ac\/","title":{"rendered":"\u6211\u56fd13.5nm\u6781\u7d2b\u5916\u5149\u523b\u5149\u6e90\u7814\u53d1\u65b0\u8fdb\u5c55\u2014\u2014\u00a0\u7834\u5c40\u9ad8\u8f6c\u6362\u6548\u7387<font _mstmutation=\"1\"><\/font>"},"content":{"rendered":"\n<p class=\"wp-block-paragraph\">\u4e2d\u56fd\u79d1\u5b66\u9662\u4e0a\u6d77\u5149\u5b66\u7cbe\u5bc6\u673a\u68b0\u7814\u7a76\u6240\u6797\u6960\u7814\u7a76\u5458\u56e2\u961f\u5728\u5176\u5efa\u7acb\u7684\u6fc0\u5149\u9a71\u52a8\u7b49\u79bb\u5b50\u4f53\u6781\u7d2b\u5916\uff08LPP-EUV\uff09\u5149\u6e90\u5b9e\u9a8c\u5e73\u53f0\u4e0a\uff0c\u5b9e\u73b0\u4e86\u9ad8\u8fbe3.42%\u76841 \u03bcm\u56fa\u4f53\u6fc0\u5149\u523013.5 nm\u6781\u7d2b\u5916\u5149\u8f6c\u6362\u6548\u7387\uff0c\u4e3b\u7126\u70b913.5 nm\u6781\u7d2b\u5916\u5355\u8109\u51b2\u80fd\u91cf\u8d8520 mJ\uff0c\u8be5\u7ed3\u679c\u5904\u4e8e\u56fd\u9645\u9760\u524d\u3001\u56fd\u5185\u9886\u5148\u6c34\u5e73\u3002\u6240\u5efa\u7acb\u7684LPP-EUV\u5149\u6e90\u5b9e\u9a8c\u5e73\u53f0\u548c\u501f\u52a9\u6b64\u5e73\u53f0\u5f00\u5c55\u7684\u6fc0\u5149\u7b49\u79bb\u5b50\u4f53\u4ea7\u751f\u6781\u7d2b\u5916\u65b0\u673a\u5236\u7814\u7a76\u7ed3\u679c\u4e3a\u56fa\u4f53\u6fc0\u5149\u9a71\u52a8LPP-EUV\u5149\u523b\u5149\u6e90\u7684\u56fd\u4ea7\u5316\u7814\u53d1\u63d0\u4f9b\u4e86\u6280\u672f\u652f\u6491\uff0c\u5bf9\u4e8e\u6211\u56fd\u81ea\u4e3b\u5f00\u5c55EUV\u5149\u523b\u53ca\u5176\u5173\u952e\u5668\u4ef6\u4e0e\u6280\u672f\u7684\u7814\u53d1\u5de5\u4f5c\u5177\u6709\u91cd\u8981\u610f\u4e49\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u56fa\u4f53\u6fc0\u5149\u5668\u56e0\u5176\u4f53\u79ef\u7d27\u51d1\u3001\u7535\u5149\u8f6c\u6362\u6548\u7387\u9ad8\uff0c\u4e14\u5df2\u5177\u5907\u9ad8\u529f\u7387\u8f93\u51fa\u6f5c\u529b\uff0c\u6709\u671b\u66ff\u4ee3CO<sub>2<\/sub>\u6fc0\u5149\u5668\u6210\u4e3a\u65b0\u4e00\u4ee3\u6fc0\u5149\u7b49\u79bb\u5b50\u4f53\u6781\u7d2b\u5916\u5149\u523b\u5149\u6e90\u7684\u9a71\u52a8\u5149\u6e90\uff0c\u672c\u6587\u5b9e\u73b0\u4e86\u9ad8\u8fbe3.42%\u76841 \u03bcm\u56fa\u4f53\u6fc0\u5149\u523013.5 nm\u6781\u7d2b\u5916\u5149\u80fd\u91cf\u8f6c\u6362\u6548\u7387\uff082%\u5e26\u5bbd\uff0c2\u03c0\u7acb\u4f53\u89d2\uff09\uff0c\u4e3b\u7126\u70b913.5 nm\u6781\u7d2b\u5916\u5355\u8109\u51b2\u80fd\u91cf\u8d8520 mJ\uff0c\u8be5\u7ed3\u679c\u5904\u4e8e\u56fd\u9645\u9760\u524d\u6c34\u5e73\uff0c\u53ef\u4e3a\u56fa\u4f53\u6fc0\u5149\u9a71\u52a8\u7b49\u79bb\u5b50\u4f53\u6781\u7d2b\u5916\u5149\u523b\u5149\u6e90\u7684\u56fd\u4ea7\u5316\u7814\u53d1\u63d0\u4f9b\u6280\u672f\u652f\u6491\u3002<\/p>\n\n\n\n<p class=\"has-light-green-cyan-color has-text-color has-link-color wp-elements-04361890abdecb93afc5becc45f4b5c1 wp-block-paragraph\"><strong>\u94fe\u63a5\uff1a<\/strong>\u80e1\u6862\u9e9f,\u00a0\u4f55\u6881,\u00a0\u738b\u5929\u6cfd,\u00a0\u6797\u6960,\u00a0\u51b7\u96e8\u6b23. 1 \u03bcm\u6fc0\u5149\u6fc0\u53d1\u56fa\u4f53Sn\u9776\u7b49\u79bb\u5b50\u4f53EUV\u8f90\u5c04\u7279\u6027\u5b9e\u9a8c\u7814\u7a76[J].\u00a0\u4e2d\u56fd\u6fc0\u5149, 2025, 52(6): 0601001.<strong>01\u7814\u7a76\u80cc\u666f<\/strong><\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u968f\u7740\u82af\u7247\u5236\u9020\u8fdb\u51653 nm\u5236\u7a0b\uff0c\u6781\u7d2b\u5916\uff08EUV\uff09\u5149\u523b\u673a\u5df2\u6210\u4e3a\u9ad8\u7aef\u82af\u7247\u5927\u89c4\u6a21\u91cf\u4ea7\u548c\u5de5\u4e1a\u5316\u4e0d\u53ef\u6216\u7f3a\u7684\u8bbe\u5907\uff0c\u76ee\u524d\u4ec5\u6709\u8377\u5170ASML\u516c\u53f8\u80fd\u591f\u5236\u9020\u4f46\u5bf9\u4e2d\u56fd\u7981\u552e\u3002EUV\u5149\u523b\u673a\u4e2d\u6700\u6838\u5fc3\u7684\u5206\u7cfb\u7edf\u662f\u6fc0\u5149\u7b49\u79bb\u5b50\u4f53\uff08LPP\uff09EUV\u5149\u6e90\uff0c\u5176\u7814\u53d1\u7684\u4e3b\u8981\u6311\u6218\u4e4b\u4e00\u662f\u63d0\u9ad8\u6fc0\u5149\u523013.5 nm EUV\u5149\u7684\u80fd\u91cf\u8f6c\u6362\u6548\u7387\uff08CE\uff09\u3002CO<sub>2<\/sub>\u6fc0\u5149\u5668\u7531\u4e8e\u53ef\u540c\u65f6\u5b9e\u73b0\u9ad8\u529f\u7387\u3001\u9ad8\u91cd\u9891\u548c\u7a84\u8109\u5bbd\u6fc0\u5149\u8f93\u51fa\uff0c\u4e14\u5176\u6fc0\u53d1\u7684Sn\u7b49\u79bb\u5b50\u4f53\u5177\u6709\u8f83\u9ad8CE\uff08&gt;5%\uff09\uff0c\u88ab\u9009\u5b9a\u4e3a\u5546\u4e1aLPP-EUV\u5149\u523b\u5149\u6e90\u7684\u9a71\u52a8\u5149\u6e90\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u8fd1\u671f\u7814\u7a76\u8868\u660e\uff0c1 \u03bcm\u56fa\u4f53\u6fc0\u5149\u6fc0\u53d1Sn\u7b49\u79bb\u5b50\u4f53\u7684CE\u6709\u53ef\u80fd\u6ee1\u8db3EUV\u5149\u523b\u5149\u6e90\u7684\u5de5\u7a0b\u5316\u6307\u6807\u3002\u6b64\u5916\uff0c\u56fa\u4f53\u8109\u51b2\u6fc0\u5149\u5668\u7ecf\u8fc7\u8fd1\u5341\u5e74\u7684\u5feb\u901f\u53d1\u5c55\u5df2\u5b9e\u73b0\u5343\u74e6\u7ea7\u529f\u7387\u8f93\u51fa\uff0c\u5e76\u5728\u672a\u6765\u6709\u671b\u8fbe\u5230\u4e07\u74e6\u7ea7\uff0c\u53c8\u7531\u4e8e\u5176\u4f53\u79ef\u7d27\u51d1\u3001\u7535\u5149\u8f6c\u6362\u6548\u7387\u9ad8\uff08~20%\uff09\uff0c\u6709\u671b\u66ff\u4ee3CO<sub>2<\/sub>\u6fc0\u5149\u6210\u4e3a\u65b0\u4e00\u4ee3LPP-EUV\u5149\u523b\u5149\u6e90\u7684\u9a71\u52a8\u5149\u6e90\u3002\u57fa\u4e8e\u6b64\uff0c\u53d1\u5c55\u56fa\u4f53\u6fc0\u5149\u9a71\u52a8\u7684LPP-EUV\u5149\u6e90\u5bf9\u6211\u56fd\u81ea\u4e3b\u5f00\u5c55EUV\u5149\u523b\u53ca\u5176\u5173\u952e\u5668\u4ef6\u4e0e\u6280\u672f\u7684\u7814\u53d1\u5177\u6709\u91cd\u8981\u610f\u4e49\u3002<strong>0<\/strong><strong>2<\/strong><strong>\u521b\u65b0\u5de5\u4f5c<\/strong><\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u4e3a\u7cfb\u7edf\u6027\u7814\u7a76\u56fa\u4f53\u6fc0\u5149\u9a71\u52a8\u7684LPP-EUV\u5149\u6e90\uff0c<strong>\u4e2d\u56fd\u79d1\u5b66\u9662\u4e0a\u6d77\u5149\u5b66\u7cbe\u5bc6\u673a\u68b0\u7814\u7a76\u6240\u6797\u6960\u7814\u7a76\u5458\u56e2\u961f\u5efa\u7acb\u4e86\u56fa\u4f53\u6fc0\u5149\u9a71\u52a8\u7b49\u79bb\u5b50\u4f53\u6781\u7d2b\u5916\u5149\u6e90\u5b9e\u9a8c\u5e73\u53f0\uff08\u56fe1\uff09<\/strong>\u3002\u8be5\u5b9e\u9a8c\u5e73\u53f0\u91c7\u7528\u4e00\u53f0\u8f93\u51fa\u6ce2\u957f\u4e3a1064 nm\u7684Nd: YAG\u6fc0\u5149\u5668\u4f5c\u4e3aSn\u7b49\u79bb\u5b50\u4f53\u7684\u9a71\u52a8\u6fc0\u5149\u3002Sn\u7b49\u79bb\u5b50\u4f53\u7684EUV\u5149\u8c31\u91c7\u7528\u5b9e\u9a8c\u5ba4\u81ea\u7814\u7684\u5e73\u573a\u5149\u6805\u5149\u8c31\u4eea\u8fdb\u884c\u6d4b\u91cf\uff0cSn\u7b49\u79bb\u5b50\u4f5313.5 nm\uff08\u5e26\u5bbd2%\uff09\u7684\u8f90\u5c04\u80fd\u91cf\u7531\u5b9e\u9a8c\u5ba4\u81ea\u7814\u7684\u5e26\u5185\u8f90\u5c04\u80fd\u91cf\u8ba1\u8fdb\u884c\u6d4b\u91cf\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"693\" src=\"http:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-7-1024x693.webp\" alt=\"\" class=\"wp-image-6165\" srcset=\"https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-7-1024x693.webp 1024w, https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-7-300x203.webp 300w, https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-7-768x520.webp 768w, https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-7-150x102.webp 150w, https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-7-450x305.webp 450w, https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-7.webp 1080w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\">\u56fe1 \u56fa\u4f53\u6fc0\u5149\u9a71\u52a8\u7b49\u79bb\u5b50\u4f53\u6781\u7d2b\u5916\u5149\u6e90\u5b9e\u9a8c\u5e73\u53f0<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u56fe2\u5c55\u793a\u4e86\u4e0d\u540c\u6fc0\u5149\u5cf0\u503c\u529f\u7387\u5bc6\u5ea6\u4e0bSn\u7b49\u79bb\u5b50\u4f53\u7684\u5f52\u4e00\u5316EUV\u5149\u8c31\uff0c\u5e26\u5185\u6ce2\u6bb5\u7528\u534a\u900f\u660e\u7d2b\u8272\u5757\u6807\u51fa\u3002Sn\u7b49\u79bb\u5b50\u4f537~23 nm\u7684EUV\u8f90\u5c04\u4e3b\u8981\u662f\u7b49\u79bb\u5b50\u4f53\u4e2dSn<sup>6+<\/sup>~Sn<sup>14+<\/sup>\u79bb\u5b50\u76844p<sup>6<\/sup>4d<sup>N<\/sup>-4p<sup>5<\/sup>4d<sup>N+1<\/sup>+4p<sup>6<\/sup>4d<sup>N-1<\/sup>4f\uff081\u2264N\u22646\uff09\u5bc6\u96c6\u8dc3\u8fc1\u4ea7\u751f\u7684\u7c7b\u8fde\u7eed\u8dc3\u8fc1\u9635\u5217\uff0c\u5373\u4e0d\u53ef\u5206\u8fa8\u8dc3\u8fc1\u9635\u5217\uff08UTA\uff09\u3002\u5f53\u6fc0\u5149\u5cf0\u503c\u529f\u7387\u5bc6\u5ea6\u9010\u6e10\u5347\u9ad8\u65f6\uff0cEUV\u5149\u8c31\u53d1\u5c04\u5cf0\u5f3a\u5ea6\u9010\u6e10\u589e\u5927\uff0c\u4e1415 nm\u4ee5\u4e0b\u7684\u76f8\u5bf9\u53d1\u5c04\u9010\u6e10\u589e\u5f3a\uff0c15 nm\u4ee5\u4e0a\u7684\u76f8\u5bf9\u53d1\u5c04\u9010\u6e10\u51cf\u5f31\uff0cUTA\u53d1\u5c04\u5cf0\u7684\u4f4d\u7f6e\u4ece\u5149\u523b\u5149\u6e90\u4e2d\u5fc3\u5de5\u4f5c\u6ce2\u957f13.5 nm\u7684\u5de6\u4fa7\u9010\u6b65\u79fb\u52a8\u5230\u53f3\u4fa7\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img decoding=\"async\" width=\"1024\" height=\"403\" src=\"http:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-1-4-1024x403.webp\" alt=\"\" class=\"wp-image-6166\" srcset=\"https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-1-4-1024x403.webp 1024w, https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-1-4-300x118.webp 300w, https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-1-4-768x302.webp 768w, https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-1-4-150x59.webp 150w, https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-1-4-450x177.webp 450w, https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-1-4.webp 1080w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\">\u56fe2 \u4e0d\u540c\u6fc0\u5149\u529f\u7387\u5bc6\u5ea6\u4e0bSn\u7b49\u79bb\u5b50\u4f53\u7684\u5f52\u4e00\u5316EUV\u5149\u8c31<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">CE\u7684\u5b9a\u4e49\u662f2\u03c0\u7acb\u4f53\u89d2\u518513.5 nm\uff082%\u5e26\u5bbd\uff09\u8f90\u5c04\u80fd\u91cf\u4e0e\u9a71\u52a8\u6fc0\u5149\u80fd\u91cf\u7684\u6bd4\u503c\u3002\u5149\u8c31\u7eaf\u5ea6\uff08SP\uff09\u662fLPP-EUV\u5149\u6e90\u7814\u7a76\u4e2d\u5e38\u5173\u6ce8\u7684\u53e6\u4e00\u4e2a\u53c2\u6570\uff0c\u5b9a\u4e49\u662f\u5e26\u5185\u8f90\u5c04\u80fd\u91cf\u4e0eEUV\u6ce2\u6bb5\u7684\u603b\u8f90\u5c04\u80fd\u91cf\u4e4b\u6bd4\u3002\u56fe3\u5c55\u793a\u4e86\u4e0d\u540c\u5cf0\u503c\u529f\u7387\u5bc6\u5ea6\u6fc0\u5149\u4f5c\u7528\u4e0bSn\u7b49\u79bb\u5b50\u4f53\u7684SP\u548cCE\uff0cCE\u7684\u6700\u5927\u503c\u4e3a3.42%\u3002\u7531\u56fe\u53ef\u89c1\uff0cSP\u548cCE\u5bf9\u4e8e\u6fc0\u5149\u5cf0\u503c\u529f\u7387\u5bc6\u5ea6\u7684\u53d8\u5316\u654f\u611f\uff0c\u56e0\u6b64\u5728\u56fa\u4f53\u6fc0\u5149\u9a71\u52a8\u7b49\u79bb\u5b50\u4f53EUV\u5149\u6e90\u7684\u5de5\u7a0b\u5316\u7814\u53d1\u4e2d\uff0c\u9700\u8981\u5bf9\u4f5c\u7528\u4e8eSn\u9776\u6750\u7684\u6fc0\u5149\u5cf0\u503c\u529f\u7387\u5bc6\u5ea6\u8fdb\u884c\u7cbe\u7ec6\u4f18\u5316\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img decoding=\"async\" width=\"1024\" height=\"439\" src=\"http:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-2-3-1024x439.webp\" alt=\"\" class=\"wp-image-6167\" srcset=\"https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-2-3-1024x439.webp 1024w, https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-2-3-300x129.webp 300w, https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-2-3-768x329.webp 768w, https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-2-3-150x64.webp 150w, https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-2-3-450x193.webp 450w, https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-2-3.webp 1080w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\">\u56fe3 \u4e0d\u540c\u6fc0\u5149\u5cf0\u503c\u529f\u7387\u5bc6\u5ea6\u4e0bSn\u7b49\u79bb\u5b50\u4f53\u7684\uff08a\uff09\u5149\u8c31\u7eaf\u5ea6\u548c\uff08b\uff09\u8f6c\u6362\u6548\u7387<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u56fe4\u5c55\u793a\u4e86\u672c\u5de5\u4f5c\u4e2d\u83b7\u5f97\u7684\u6700\u5927CE\u548c\u56fd\u9645\u4e0a\u5404\u56e2\u961f\u4e0e\u516c\u53f8\u5bf91 \u03bcm\u56fa\u4f53\u6fc0\u5149\u9a71\u52a8\u7b49\u79bb\u5b50\u4f53EUV\u5149\u6e90CE\u7684\u5b9e\u9a8c\u7ed3\u679c\u3002\u7531\u56fe\u53ef\u89c1\uff0c\u672c\u5de5\u4f5c\u6240\u83b7\u5f97\u7684CE\u6700\u5927\u503c3.42%\u5df2\u5904\u4e8e\u56fd\u9645\u9760\u524d\u6c34\u5e73\uff0c\u5e76\u8d85\u8fc7\u5546\u4e1a\u5316CO<sub>2<\/sub>\u6fc0\u5149\u9a71\u52a8EUV\u5149\u523b\u5149\u6e90CE\u503c\u7684\u4e00\u534a\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"526\" src=\"http:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-3-3-1024x526.webp\" alt=\"\" class=\"wp-image-6168\" srcset=\"https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-3-3-1024x526.webp 1024w, https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-3-3-300x154.webp 300w, https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-3-3-768x395.webp 768w, https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-3-3-150x77.webp 150w, https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-3-3-450x231.webp 450w, https:\/\/news.rg-laser.com\/wp-content\/uploads\/2025\/04\/640-3-3.webp 1080w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\">\u56fe4 \u56fd\u9645\u4e0a\u5404\u56e2\u961f\u548c\u516c\u53f8\u5b9e\u73b0\u76841 \u03bcm\u56fa\u4f53\u6fc0\u5149\u9a71\u52a8\u7b49\u79bb\u5b50\u4f53EUV\u5149\u6e90\u8f6c\u6362\u6548\u7387\u5bf9\u6bd4<strong>0<\/strong><strong>3<\/strong><strong>\u603b\u7ed3<\/strong><\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u672c\u6587\u5efa\u7acb\u4e86\u56fa\u4f53\u6fc0\u5149\u9a71\u52a8\u7b49\u79bb\u5b50\u4f53EUV\u5149\u6e90\u5b9e\u9a8c\u5e73\u53f0\uff0c\u5f00\u5c55\u4e861 \u03bcm\u56fa\u4f53\u6fc0\u5149\u6fc0\u53d1Sn\u7b49\u79bb\u5b50\u4f53EUV\u8f90\u5c04\u7279\u6027\u5b9e\u9a8c\u7814\u7a76\uff0c\u5b9e\u73b0\u4e86\u9ad8\u8fbe3.42%\u76841 \u03bcm\u56fa\u4f53\u6fc0\u5149\u523013.5 nm\u6781\u7d2b\u5916\u5149\u7684\u80fd\u91cf\u8f6c\u6362\u6548\u7387\uff0c\u4e3b\u7126\u70b913.5 nm\u6781\u7d2b\u5916\u5355\u8109\u51b2\u80fd\u91cf\u8d8520 mJ, \u5904\u4e8e\u56fd\u9645\u9760\u524d\u3001\u56fd\u5185\u9886\u5148\u6c34\u5e73\u3002\u76f8\u5173\u7814\u7a76\u7ed3\u679c\u5bf9\u4e8e\u6211\u56fd\u81ea\u4e3b\u5f00\u5c55EUV\u5149\u523b\u53ca\u5176\u5173\u952e\u5668\u4ef6\u4e0e\u6280\u672f\u7684\u7814\u53d1\u5de5\u4f5c\u5177\u6709\u91cd\u8981\u610f\u4e49\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u901a\u4fe1\u4f5c\u8005\u7b80\u4ecb<\/strong><\/p>\n\n\n\n<blockquote class=\"wp-block-quote is-layout-flow wp-block-quote-is-layout-flow\">\n<p class=\"has-very-light-gray-background-color has-background has-small-font-size wp-block-paragraph\"><strong>\u6797\u6960<\/strong>\uff0c\u4e2d\u5171\u515a\u5458\uff0c\u7814\u7a76\u5458\/\u535a\u5bfc\uff0c\u56fd\u5bb6\u6d77\u5916\u9ad8\u5c42\u6b21\u4eba\u624d\uff0c\u4e0a\u6d77\u5e02\u767d\u7389\u5170\u4eba\u624d\uff0c\u6b27\u76df\u739b\u4e3d\u5c45\u91cc\u5b66\u8005\u3002\u66fe\u4efb\u8377\u5170ASML\u516c\u53f8\u7814\u53d1\u79d1\u5b66\u5bb6\u3001\u7814\u53d1\u90e8\u5149\u6e90\u6280\u672f\u8d1f\u8d23\u4eba\u3002\u73b0\u4efb\u4e2d\u56fd\u79d1\u5b66\u9662\u4e0a\u6d77\u5149\u5b66\u7cbe\u5bc6\u673a\u68b0\u7814\u7a76\u6240\u7814\u7a76\u5458\u3001\u535a\u5bfc\uff0c\u8d85\u5f3a\u6fc0\u5149\u79d1\u5b66\u4e0e\u6280\u672f\u5168\u56fd\u91cd\u70b9\u5b9e\u9a8c\u5ba4\u526f\u4e3b\u4efb\uff0c\u7cbe\u5bc6\u5149\u5b66\u5de5\u7a0b\u90e8\u6280\u672f\u603b\u5e08\uff0c\u4e2d\u56fd\u4eea\u5668\u4eea\u8868\u5b66\u4f1a\u96c6\u6210\u7535\u8def\u5206\u4f1a\u59d4\u5458\uff0c\u4e2d\u56fd\u5149\u5b66\u5de5\u7a0b\u5b66\u4f1a\u5fae\u7eb3\u4e13\u59d4\u4f1a\u59d4\u5458\u3002\u957f\u671f\u4ece\u4e8b\u96c6\u6210\u7535\u8def\u5236\u9020\u5149\u523b\u5149\u6e90\u4ee5\u53ca\u82af\u7247\u91cf\u68c0\u6d4b\u5149\u6e90\u7814\u53d1\u4e0e\u5de5\u7a0b\u5e94\u7528\u7814\u7a76\uff0c\u62e5\u6709\u5341\u4f59\u5e74\u5927\u89c4\u6a21\u96c6\u6210\u7535\u8def\u5236\u9020\u4e0e\u6d4b\u91cf\u8bbe\u5907\u79d1\u7814\u3001\u5de5\u7a0b\u9879\u76ee\u7814\u53d1\u548c\u7ba1\u7406\u7ecf\u9a8c, \u622a\u6b62\u76ee\u524d\u7533\u8bf7\/\u6388\u6743\u7f8e\u3001\u65e5\u3001\u97e9\u7b49\u56fd\u56fd\u9645\u4e13\u5229110\u4f59\u9879\uff0c\u591a\u9879\u4e13\u5229\u5df2\u5b8c\u6210\u4ea7\u54c1\u8f6c\u5316\u642d\u8f7d\u5728\u6700\u65b0\u578b\u5149\u523b\u673a\u53ca\u91cf\u68c0\u6d4b\u8bbe\u5907\u4e2d\u3002\u745e\u5178\u9686\u5fb7\u5927\u5b66\u7855\u58eb\uff0c\u5e08\u4ece2023\u8bfa\u8d1d\u5c14\u7269\u7406\u5b66\u5956\u5f97\u4e3bAnne l&#8217;Huillier\u9662\u58eb\u3002\u5df4\u9ece\u8428\u514b\u96f7\u5927\u5b66\u4e0e\u6cd5\u56fd\u539f\u5b50\u80fd\u7f72\u8054\u5408\u57f9\u517b\u535a\u58eb\u3002\u745e\u58eb\u82cf\u9ece\u4e16\u8054\u90a6\u7406\u5de5\u5927\u5b66\u535a\u58eb\u540e\u3002<font _mstmutation=\"1\"><\/font><\/p>\n<\/blockquote>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u4e2d\u56fd\u79d1\u5b66\u9662\u4e0a\u6d77\u5149\u5b66\u7cbe\u5bc6\u673a\u68b0\u7814\u7a76\u6240\u6797\u6960\u7814\u7a76\u5458\u56e2\u961f\u5728\u5176\u5efa\u7acb\u7684\u6fc0\u5149\u9a71\u52a8\u7b49\u79bb\u5b50\u4f53\u6781\u7d2b\u5916\uff08LPP-EUV\uff09\u5149\u6e90\u5b9e\u9a8c\u5e73\u53f0\u4e0a<\/p>\n","protected":false},"author":1,"featured_media":6169,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_bbp_topic_count":0,"_bbp_reply_count":0,"_bbp_total_topic_count":0,"_bbp_total_reply_count":0,"_bbp_voice_count":0,"_bbp_anonymous_reply_count":0,"_bbp_topic_count_hidden":0,"_bbp_reply_count_hidden":0,"_bbp_forum_subforum_count":0,"inline_featured_image":false,"footnotes":""},"categories":[19,37],"tags":[],"class_list":["post-6164","post","type-post","status-publish","format-standard","has-post-thumbnail","category-ent-arts","category-xpzs"],"_links":{"self":[{"href":"https:\/\/news.rg-laser.com\/index.php\/wp-json\/wp\/v2\/posts\/6164","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/news.rg-laser.com\/index.php\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/news.rg-laser.com\/index.php\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/news.rg-laser.com\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/news.rg-laser.com\/index.php\/wp-json\/wp\/v2\/comments?post=6164"}],"version-history":[{"count":1,"href":"https:\/\/news.rg-laser.com\/index.php\/wp-json\/wp\/v2\/posts\/6164\/revisions"}],"predecessor-version":[{"id":6170,"href":"https:\/\/news.rg-laser.com\/index.php\/wp-json\/wp\/v2\/posts\/6164\/revisions\/6170"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/news.rg-laser.com\/index.php\/wp-json\/wp\/v2\/media\/6169"}],"wp:attachment":[{"href":"https:\/\/news.rg-laser.com\/index.php\/wp-json\/wp\/v2\/media?parent=6164"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/news.rg-laser.com\/index.php\/wp-json\/wp\/v2\/categories?post=6164"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/news.rg-laser.com\/index.php\/wp-json\/wp\/v2\/tags?post=6164"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}